Substrate processing apparatus and method
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United States of America Patent
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Nov 11, 1997
Grant Date -
N/A
app pub date -
Apr 7, 1995
filing date -
Apr 8, 1994
priority date (Note) -
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Abstract
Transport robot circulates in a predetermined order among a plurality of substrate processing parts while holds substrates, thereby to perform circulating transportation of the substrates. Controller calculates a minimum wait cycle which corresponds to the number of circulating transportation during time from first circulating of a first substrate to first circulating of a second substrate under the condition that interference between the first and second substrates is prohibited. When the minimum wait cycle is shorter than a standard wait cycle which corresponds to the number of circulating transportation for processing of the first substrate, starting of the circulating transportation of the second substrate is delayed in the range of the minimum wait cycle to a standard wait cycle. Hence, the processing of the second substrate can be started without waiting for completion of the processing of the first substrate, resulting in that through put is improved.
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