Apparatus for coating elongated material with photoresist
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United States of America Patent
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Nov 18, 1997
Grant Date -
N/A
app pub date -
Oct 18, 1995
filing date -
Nov 18, 1994
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
An elongated material treatment apparatus includes, a coating device for coating a photoresist on a main region in a principal surface of an elongated material with a photoresist, and a conveying device for transporting the elongated material from a cleaning device to the coating device while supporting a transport support region in the principal surface cleaned by the cleaning device, there is a cleaning fluid removing device between the cleaning device and the coating device for removing a cleaning fluid deposited on the transport support region, whereby the elongated material is prevented from slipping during the transport of the elongated material by the conveying device and is correctly transported. The elongated material is transported to the coating device, with the cleaning fluid left in the main region, permitting uniform coating of the photoresist on the main region.
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