Method of and apparatus for removing coating from edge of substrate
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United States of America Patent
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-
Nov 18, 1997
Grant Date -
N/A
app pub date -
Mar 8, 1996
filing date -
Mar 9, 1995
priority date (Note) -
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status (Latency Note)
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Abstract
A removing unit for removing coating from the edge of a substrate has a vertical unit body housing a pair of pipes connected to a solvent reservoir and having respective solvent supply parts. The unit body has a head disposed in an upper end portion thereof. The head has a horizontal slot which opens at opposite ends thereof and at one side thereof for receiving an edge of a substrate. Solvent is supplied into the slot, drawn therealong and discharged from an end of the slot, all in a contained manner. A edge of a substrate is horizontally inserted into the slot so as to be immersed in the solvent contained in the slot, and the unit body is moved along the substrate edge so that the solvent cleans undesired coating from the edge.
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