Rapid thermal heating apparatus and control therefor
Number of patents in Portfolio can not be more than 2000
United States of America Patent
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-
Nov 18, 1997
Grant Date -
N/A
app pub date -
Jul 31, 1995
filing date -
Jan 19, 1990
priority date (Note) -
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status (Latency Note)
Importance
Abstract
A rapid thermal heating apparatus in which lamps are disposed in a plurality of light pipes arranged to illuminate and supply heat to a substrate. The light pipes are positioned so that the illumination patterns overlap. The energy supplied to the lamps is controlled to provide a predetermined heating pattern to the substrate. A liquid cooled window cooperates with the light pipes to transmit energy to a wafer disposed in an evacuated chamber.
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