Friction vacuum pump with pump sections of different designs
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United States of America Patent
Stats
-
Dec 9, 1997
Grant Date -
N/A
app pub date -
Oct 30, 1995
filing date -
May 3, 1993
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A friction vacuum pump (1) is provided with pump sections of different designs, of which the pump section on the inlet side consists of turbomolecular pump stages (14, 15) and a further pump section of Siegbahn stages (16, 17) with spiral grooves (19), whereby the active pumping surfaces of the Siegbahn stages are formed by facing surfaces of an annular rotor disc and an annular stator disc (16, 17). To simplify the production of such a pump, it is proposed that the annular stator discs (16) have spiral grooves (19).
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