Method of manufacturing a composite substrate and a piezoelectric device using the substrate
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United States of America Patent
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Dec 16, 1997
Grant Date -
N/A
app pub date -
May 7, 1996
filing date -
May 8, 1995
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A method of manufacturing a composite substrate and the composite substrate manufactured thereby wherein surfaces of first and second substrates having different thermal expansion coefficients are mirror finished and layered on each other. A first heat treatment is applied after which a part of the second substrate is removed to a depth sufficient to expose the first substrate. A final second heat treatment directly bonds the substrates.
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