Process for producing ceramic microstructures from polymeric precursors

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United States of America Patent

PATENT NO 5698485
SERIAL NO

08589414

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Abstract

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A process for producing a ceramic having a microstructured surface with a surface profile depth of less than 1 micron, measured by the atomic force microscopy, comprising preparing a polymeric precursor material, shaping the precursor material into a structured mold insert of an inherently stable mold insert material having a structured surface geometry corresponding with the microstructured surface of the ceramic to form a shaped precursor material, the shaped precursor material being rendered infusible by chemical crosslinking, and wherein the inherently stable mold insert material is selected from materials having sufficient strength for structuring and high molding accuracy, and pyrolyzing the shaped precursor material, whereby the ceramic having the microstructured surface is obtained.

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Patent Owner(s)

Patent OwnerAddress
ROBERT BOSCH GMBHPOSTFACH 30 02 20 70442 STUTTGART

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Bocker, Wolfgang Eppstein, DE 3 40
Bruck, Martin Weilrod, DE 31 170
Ehrfeld, Wolfgang Mainz, DE 52 1318
Giebel, Ludwig Mainz, DE 1 26
Lacher, Manfred Mainz, DE 4 88
Vaahs, Tilo Eppstein, DE 27 160

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