Deformable mirror device and manufacturing method thereof
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United States of America Patent
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-
Dec 16, 1997
Grant Date -
N/A
app pub date -
Apr 25, 1996
filing date -
Jul 27, 1995
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A deformable mirror device and a manufacturing method thereof, which decreases the possibility of damage to a substrate having an address scanning circuit and increases the efficiency of light reflection of a moving mirror. First and second moving mirrors and first and second posts are fabricated on a substrate. An address scanning circuit (SRAM) is fabricated on another substrate, independently. Finally, both the substrates are combined. The second post is vertically formed by sputtering after the second moving mirror is formed.
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