Wafer gripper
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
Dec 23, 1997
Grant Date -
N/A
app pub date -
Sep 13, 1995
filing date -
Sep 13, 1995
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
A wafer gripper assembly comprises first and second gripping members movably supported relative to each other. A motor propels the gripping members linearly towards and away from each other. Preferably both gripping members are movably supported, and a rotary-to-linear translator produces equal and opposite linear movement of the gripping members. Typically, at least six contactor elements are defined on the pair of gripping members. The contactor elements include a vertically extending portion having an inwardly facing convex surface for contacting an edge of a wafer, and an inwardly extending flange for supporting a lower surface of the wafer.
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Family
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Cited Art Landscape
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