Substrate processing apparatus
Number of patents in Portfolio can not be more than 2000
United States of America Patent
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-
Dec 30, 1997
Grant Date -
N/A
app pub date -
Sep 27, 1996
filing date -
Mar 3, 1994
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
A single transport path for transporting a substrate between the cassettes and a plurality of processing units, is arranged between the cassette storing means and the processing means. Hence, it is possible to skip some processing units or to change the order of the processing units easily, with simplifying the construction of the apparatus. Furthermore, the single transport path causes to reduce the space for transporting the substrate.
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Cited Art Landscape
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