Support post architecture for micromechanical devices
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United States of America Patent
Stats
-
Dec 30, 1997
Grant Date -
N/A
app pub date -
Nov 2, 1994
filing date -
Nov 2, 1994
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A support pillar 426 for use with a micromechanical device, particularly a digital micromirror device, comprising a pillar material 422 supported by a substrate 400 and covered with a metal layer 406. The support pillar 426 is fabricated by depositing a layer of pillar material on a substrate 400, patterning the pillar layer to define a support pillar 426, and depositing a metal layer 406 over the support pillar 426 enclosing the support pillar. A planar surface even with the top of the pillar may be created by applying a spacer layer 432 over the pillars 426. After applying the spacer layer 432, the spacer layer 432 is etched to expose the tops of the pillars.
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