Software to determine the position of the center of a wafer
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United States of America Patent
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-
Jan 6, 1998
Grant Date -
N/A
app pub date -
May 7, 1996
filing date -
May 7, 1996
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A computer program that evaluates data to determine the position of the center of a wafer. The program processes data generated by gate sensors that detect points on the wafer's outer edge. The sensors provide information about a leading and a trailing edge of the wafer. The program then determines if the data points are those on the circular perimeter of the wafer so that points on the flat or notch may be eliminated from the calculation of the center point.
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