Substrate rotating device
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United States of America Patent
Stats
-
Jan 13, 1998
Grant Date -
N/A
app pub date -
Jan 23, 1996
filing date -
Jan 24, 1995
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
A substrate rotating device includes a turn table placed horizontally, a substrate supporting member provided on the turn table, for supporting a substrate with respect to a vertical direction and for regulating the position of the outside periphery of the substrate with respect to a horizontal direction, a driving mechanism causing rotation of the turn table, an opening formed in the turn table, and an evacuating mechanism rotatable as a unit with the turn table, for forcibly evacuating a space between the turn table and the substrate through the opening,
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Cited Art Landscape
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