Apparatus and method for detecting defects arising as a result of integrated circuit processing
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United States of America Patent
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Jan 27, 1998
Grant Date -
N/A
app pub date -
Nov 3, 1995
filing date -
Nov 3, 1995
priority date (Note) -
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Abstract
A probe card tester for detecting defects occurring as a result of integrated circuit processing of a substrate having a plurality of space to conductors with a contact at each end of each conductor, includes: a probe card tester including a set of parallel resistors for connecting at least one in parallel with each conductor and a set of series resistors for connecting together the ends of the conductors to form a series resistance and a number of probe elements, one corresponding to each end of each conductor, for interconnecting the parallel and series resistors with the conductors for detecting defects bridging the conductors.
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