Method of manufacturing a compound semiconductor thin film for a photoelectric or solar cell device
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United States of America Patent
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Feb 3, 1998
Grant Date -
N/A
app pub date -
May 16, 1996
filing date -
May 17, 1995
priority date (Note) -
Expired
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Abstract
This invention relates to a manufacturing method of a compound semiconductor thin film derived from a metal sulfide produced by thermal decomposition of a sulfur-containing metal organic compound, the compound containing at least one functional group having at least one metal atom selected from the group consisting of copper, zinc, cadmium, mercury, and lead, and the functional group also containing at least one sulfur atom. Since the obtained metal sulfides are of high-purity and dense, they can be utilized in various photoelectric devices. Particularly, the photoelectric conversion efficiency of a CdS/CdTe system thin film compound semiconductor solar cell can be improved remarkably by employing a layer made of a CdS thin film as a window of the solar cell.
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