Unsticking mirror elements of digital micromirror device
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United States of America Patent
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Feb 10, 1998
Grant Date -
N/A
app pub date -
Jan 10, 1995
filing date -
Jan 10, 1995
priority date (Note) -
Expired
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Abstract
A method of repositioning mirror elements (10) of a digital micromirror device (DMD) that have become stuck in an 'on' or an 'off' position. The mirror element (10) is irradiated with a short high-energy pulse of visible light. The method may be easily performed during fabrication at the wafer level, and may be followed by a passivation step to prevent further sticking.
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