Apparatus and process for operating a dry-compression vacuum pump

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United States of America Patent

PATENT NO 5718565
SERIAL NO

08411826

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Abstract

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A process for operating a dry-compression vacuum pump with at least one pump chamber and at least one rotor driven by an electric motor, and to a vacuum pump suitable for this operating process. To reduce operational shutdowns for maintenance purposes without any risk to the pump, it is proposed that application-specific phenomena leading to deviations from the normal operating status or their effects be monitored and, after a predetermined deviation quantity has been attained at which operation of the vacuum pump could be adversely affected in future, steps be taken to remove the causes thereof.

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Patent Owner(s)

Patent OwnerAddress
LEYBOLD AKTIENGESELLSCHAFTHANAU

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Bahnen, Rudolf Roetgen, DE 20 121
Kriehn, Hartmut Koln, DE 14 103
Kuhn, Monika Koln, DE 3 21

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