Articulated arm transfer device
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United States of America Patent
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Feb 24, 1998
Grant Date -
N/A
app pub date -
May 3, 1995
filing date -
Apr 16, 1993
priority date (Note) -
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Abstract
A concentric-shaft rotational drive system for an articulated arm transfer device adaptable for imparting movement to an assembly inside a vacuum chamber wherein rotary movement is imparted to rotors inside the vacuum chamber by means of magnetic fields produced by stators outside the vacuum chamber.
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