Process and apparatus for producing a functional structure of a semiconductor component
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United States of America Patent
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Mar 10, 1998
Grant Date -
N/A
app pub date -
Sep 26, 1995
filing date -
Sep 3, 1992
priority date (Note) -
Expired
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Abstract
In order to improve a process and an apparatus for producing a functional structure of a semiconductor component, which comprises layers arranged on a base substrate and defining the entire functions of the semiconductor component, such that the functional structure of the semiconductor components can be produced as simply as possible and with as little susceptibility as possible with respect to the quality of the semiconductor components it is suggested that all the layers be produced without lithography and applied to the base substrate one after the other exclusively with physical layer application processes.
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