Micro mechanical component and production process thereof
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United States of America Patent
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Mar 17, 1998
Grant Date -
N/A
app pub date -
Mar 20, 1995
filing date -
Mar 24, 1994
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
A micro mechanical component of the present invention comprises a base, and at least one drive portion supported on the base and relatively driving to the base, in which the drive portion is formed from a diamond layer. Thus, because the drive portion has excellent mechanical strength and modulus of elasticity, the operational performance can be greatly improved as a micro mechanical component processed in a fine shape, from the conventional level. Further, because the drive portion exhibits excellent device characteristics under severe circumstances, the range of applications as a micro mechanical component can be widely expanded from the conventional range.
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