Tuneable microelectromechanical system resonator
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United States of America Patent
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Mar 17, 1998
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N/A
app pub date -
May 23, 1997
filing date -
Jun 12, 1995
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Abstract
A resonant beam or cantilever is implemented in single crystal silicon or polysilicon. Adjacent the end of the cantilever is an electrode capable of receiving a variable voltage. The cantilever has a natural mechanical resonant frequency when vibrated, and the varying electrostatic field resulting from the variation of applied voltage to the electrode is used to alter the natural restoring force of the cantilever so that a chosen vibration frequency of the cantilever can be achieved. Such vibrating cantilever can be used as the bases for a voltage control oscillator.
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