Transfer apparatus for and method of transferring substrate
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United States of America Patent
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-
Mar 24, 1998
Grant Date -
N/A
app pub date -
Oct 4, 1996
filing date -
Oct 9, 1995
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A transfer apparatus is adapted for transferring a substrate between two processing sections and includes two storage cassettes and two transfer robots. A first storage cassette has an insertion opening inserted in a first direction and a withdrawal opening oriented in a second direction, where the first and second directions intersect. A second storage cassette has an insertion opening oriented in a third direction and a withdrawal opening oriented in a fourth direction which fourth direction intersects the third direction. A first transfer device transfers a substrate from one of the two processing sections to the first storage cassette through the insertion opening of the first storage cassette and then transfers a substrate from the second storage cassette to the one processing section via the withdrawal opening of the second storage cassette. A second transfer device transfers a substrate from the first storage cassette to the other processing section via the withdrawal opening of the first storage cassette and then transfers a substrate from the other processing section to the second storage cassette through the insertion opening of the second storage cassette.
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