Producing solar cells by surface preparation for accelerated nucleation of microcrystalline silicon on heterogeneous substrates
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United States of America Patent
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Mar 24, 1998
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app pub date -
Jun 27, 1996
filing date -
Jun 27, 1996
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Abstract
Attractive multi-junction solar cells and single junction solar cells with excellent conversion efficiency can be produced with a microcrystalline tunnel junction, microcrystalline recombination junction or one or more microcrystalline doped layers by special plasma deposition processes which includes plasma etching with only hydrogen or other specified etchants to enhance microcrystalline growth followed by microcrystalline. nucleation with a doped hydrogen-diluted feedstock.
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