Method and apparatus for aligning and supporting semiconductor process gas delivery and regulation components
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United States of America Patent
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Mar 31, 1998
Grant Date -
N/A
app pub date -
Mar 8, 1996
filing date -
Mar 8, 1996
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A mounting system, for supporting semiconductor process gas delivery and control components for assembly and use as a gas stick, aligns the connection union seals between fittings on adjacent components to absorb accumulated stresses resulting from manufacturing tolerances and reduce the likelihood of seal leakage. Components are mounted on individual upper clamp members which are secured to lower clamp members to form a slidable but non-rotatable radially aligned yoke around a rigid elongate support member for subsequent longitudinal positioning and joining of adjacent fittings.
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