Fabrication method for thin film capacitors

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 5736448
SERIAL NO

08566616

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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A capacitor is fabricated on a base surface by applying a first pattern of electrical conductors (a first capacitor plate) over the base surface with an outer surface of the first pattern of electrical conductors including molybdenum. A first hard portion of a capacitor dielectric layer including amorphous hydrogenated carbon is deposited over the first capacitor plate and the base surface, a soft portion of the capacitor dielectric layer is deposited over the first hard portion, and a second hard portion of the capacitor dielectric layer is deposited over the soft portion. The deposition of the soft portion occurs at a lower bias voltage than the deposition of the first and second hard portions. A second pattern of electrical conductors (a second capacitor plate) is applied over the capacitor dielectric layer which is then patterned. A polymer layer is applied over the first and second capacitor plates, and two vias are formed, a first via extending to the first capacitor plate and a second via extending to the second capacitor plate. An electrode-coupling pattern of electrical conductors is applied over the polymer layer, a first portion extending into the first via and a second portion extending into the second via. Deposition of the capacitor dielectric layer can include using a methylethylketone precursor. Additional capacitor dielectric layers and plates having staggered via landing pads can be layered to increase the capacitance.

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Patent Owner(s)

Patent OwnerAddressTotal Patents
GENERAL ELECTRIC COMPANYSCHENECTADY, NY19473

International Classification(s)

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Durocher, Kevin Matthew Waterford, NY 58 1250
Gorowitz, Bernard Clifton Park, NY 27 1400
Saia, Richard Joseph Schenectady, NY 42 1338

Cited Art Landscape

Patent Info (Count) # Cites Year
 
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* Cited By Examiner

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Patent Info (Count) # Cites Year
 
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