Method and materials for fabricating an ink-jet printhead
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United States of America Patent
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Apr 14, 1998
Grant Date -
N/A
app pub date -
Sep 12, 1996
filing date -
Sep 12, 1996
priority date (Note) -
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Abstract
An ink-jet printhead fabrication technique enables capillary channels for liquid ink to be formed with square or rectangular cross-sections. A sacrificial layer is placed over the main surface of a silicon chip, the sacrificial layer being patterned in the form of the void formed by the desired ink channels. A permanent layer, comprising permanent material, is applied over the sacrificial layer, and, after polishing the two layers to form a uniform surface, the sacrificial layer is removed. Preferred materials for the sacrificial layer include polyimide while preferred materials for the permanent layer include polyarylene ether, although a variety of material combinations are possible.
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