Semiconductor device having improved surface evenness

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United States of America Patent

PATENT NO 5739590
SERIAL NO

08457149

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Abstract

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A semiconductor device is constructed to have an insulating layer containing an impurity provided upon a semiconductor substrate. This insulating layer contains a plurality of windows of different sizes. A first layer is provided in the windows. This first layer does not extend over a periphery of the windows to the surface of the insulating layer. Further, this semiconductor device is constructed such that the surface of the insulating layer and the first layer opposite the semiconductor substrate are flat. In addition, the semiconductor substrate in contact with the first layer also contains the impurity. The semiconductor device, having less surface unevenness that a conventional device, provides both improved and greater stability of device properties.

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Patent Owner(s)

Patent OwnerAddress
CANON KABUSHIKI KAISHAOHTA-KU TOKYO 146-8501

International Classification(s)

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Morishita, Masakazu Hiratsuka, JP 95 2290
Nishimura, Shigeru Hiratsuka, JP 39 1094
Sakamoto, Masaru Atsugi, JP 80 1246

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