Anode basket for controlling plating thickness distribution
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United States of America Patent
Stats
-
Apr 28, 1998
Grant Date -
N/A
app pub date -
Dec 12, 1996
filing date -
Dec 12, 1996
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
An anode basket containing anode particles used for electroplating a work piece. The anode basket includes baffles positioned inside the basket at selected locations. Hinges secure the baffles to opposing sidewalls of the basket and allow the baffles to pivot when sufficient manual force is applied to the respective hinges and/or baffle. The hinged baffles can be positioned to form separate compartments, enabling anode particles to be placed in different amounts at selected locations. If desired, some of the locations can have no anode particles. This permits more focused control of the metal ions.
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