Antireflective coatings comprising a lubricating layer having a specific surface energy
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United States of America Patent
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Apr 28, 1998
Grant Date -
N/A
app pub date -
Apr 3, 1995
filing date -
Apr 3, 1995
priority date (Note) -
Expired
status (Latency Note)
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Abstract
An improved way to impart antireflection properties to light transmissive substrates and, at the same time, achieve a durable surface and electrical conductivity is disclosed. A stack of at least two sputter-deposited light transmissive inorganic layers, one of which being electrically conductive and having a high index of refraction with the one above it (relative to the substrate being antireflected) having a low index of refraction, in combination with a thin lubricating overlayer comprising a solvent-soluble lubricant such as a solvent-soluble fluoropolymer can achieve this desired combination of properties.
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