High speed, high accuracy multi-stage tool positioning system

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United States of America Patent

PATENT NO 5751585
SERIAL NO

08615049

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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A multi-rate positioner system (50) receives unpanelized positioning commands from a database storage subsystem (64), profiles the commands (72) into a half-sine positioning signal, and further processes the signal into a low-frequency positioning signal (LFP) and a high-frequency positioning signal (HFP) for actuating respective slow (56, 58) and fast (54) positioners to target locations on a workpiece (62). The slow and fast positioners move without necessarily stopping in response to a stream of positioning command data while coordinating their individually moving positions to produce temporarily stationary tool positions (140) over target locations defined by the database. The multi-rate positioning system reduces the fast positioner movement range requirement while providing significantly increased tool processing throughput.

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Patent Owner(s)

  • ELECTRO SCIENTIFIC INDUSTRIES, INC.

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Cutler, Donald R Portland, OR 12 639
Pailthorp, Robert M Portland, OR 9 547
Unrath, Mark A Aloha, OR 23 673

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