Ink jet recording head with pressure chambers arranged along a 112 lattice orientation in a single-crystal silicon substrate
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United States of America Patent
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May 19, 1998
Grant Date -
N/A
app pub date -
Apr 19, 1996
filing date -
Apr 19, 1995
priority date (Note) -
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Abstract
In an ink jet head having: a nozzle plate in which a plurality of nozzle openings are formed; a flow path substrate comprising a reservoir to which ink is externally supplied, and a plurality of pressure chambers which are connected to the reservoir via an ink supply port and which respectively communicate with the nozzle openings; an elastic film which pressurizes ink in the pressure chambers; and driving means located at a position opposing the respective pressure chambers for causing the elastic film to conduct flexural deformation, the pressure chambers are arranged in a single-crystal silicon substrate of a (110) lattice plane and along a <112> lattice orientation.
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