Biomedical device with a protective overlayer
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United States of America Patent
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May 26, 1998
Grant Date -
N/A
app pub date -
Mar 14, 1996
filing date -
Mar 14, 1996
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A biomedical device provided with a protective overlayer with high electronic resistivity and low permeability to H.sub.2 O; the protective overlayer comprising at least one thin film of amorphous silicon oxycarbide (a-SiOC:H) in which the oxygen/carbon ratio is such that the electronic resistivity of the a-SiOC:H is greater than 10.sup.14 .OMEGA.-cm and the H.sub.2 O permeability is less than 5.times.10.sup.14 molecules/sec-cm.sup.2.
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