Lithium ionic conducting glass thin film and carbon dioxide sensor comprising the glass thin film
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United States of America Patent
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May 26, 1998
Grant Date -
N/A
app pub date -
Feb 12, 1996
filing date -
Jun 13, 1994
priority date (Note) -
Expired
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Abstract
The lithium ionic conducting glass thin film of the present invention comprises a glass containing 20 to 80 mol % of an Li.sub.2 O component. This glass thin film has a dense structure which shuts off gas and can be used as a solid electrolyte in a carbon dioxide sensor. The thin carbon dioxide sensor of the present invention comprises the above lithium ionic conducting glass thin film as a solid electrolyte. This sensor enables complete elimination of noise attributed to gas permeation by virtue of the lithium ionic conducting glass thin film having a dense structure with the result that the accuracy of carbon dioxide concentration measurement can be enhanced. Further, the lithium ionic conducting glass is formed into a thin film, so that the sensor has a low internal resistance, acts at low operating temperatures and exhibits a high response speed. Therefore, a heater having a capacity smaller than in the prior art can be used in the sensor, so that, even when a structure integral with a heater and the like is employed, miniaturization of the sensor can be realized.
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