Fly-eye lens, illumination optical apparatus, and exposure apparatus

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 5760963
SERIAL NO

08619252

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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A fly-eye lens in accordance with the present invention comprises a plurality of lens elements which are arranged in two-dimensionally close contact with each other so as to connect light-entering and light-exit surfaces of the lens elements to each other, while at least three refractive surfaces with a predetermined refractive power are disposed between the light-entering and light-exit surfaces in each of the lens elements. Here, each of the plurality of lens elements has an identical focal length f and, concering a bundle of rays which enters each of the lens elements in parallel to its optical axis with a maximum incident height h.sub.max and then is emitted therefrom with an exit angle .theta..sub.max, substantially satisfies a conditional expression: h.sub.max =f.multidot.sin .theta..sub.max Accordingly, the plurality of lens elements substantially satisfy a sine condition, whereby the fly-eye lens forms a perfect diffusing surface light source.

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Patent Owner(s)

  • NIKON CORPORATION

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Mori, Takashi Kawasaki, JP 302 2991

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