Defect management system for productivity and yield improvement
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United States of America Patent
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Jun 2, 1998
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N/A
app pub date -
Oct 6, 1995
filing date -
Oct 6, 1995
priority date (Note) -
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Abstract
An automated wafer defect management system in which wafer defect data are collected from wafer inspection instruments, converted into a standard data format and made available through a central database system to workstations for review, analysis, and evaluation.
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