Substrate processing apparatus
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United States of America Patent
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Jun 9, 1998
Grant Date -
N/A
app pub date -
Sep 7, 1995
filing date -
Sep 9, 1994
priority date (Note) -
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status (Latency Note)
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Abstract
A substrate processing apparatus includes a plurality of easily removable processing units including at least a heating unit for heating a substrate and a cooling unit for cooling the substrate, and an outer frame having a plurality of compartments. Each compartment has an opening through which a processing unit may be inserted or removed. The plurality of compartments are arranged vertically. Each compartment has a plurality of first joint members connected to utility lines including those of an electrical system, a control system, and a fluid system. The electrical, control, and fluid systems are necessary for operating the processing units. Each processing unit has a plurality of second joint members connected to the first joint members.
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