Wafer transport robot arm for transporting a semiconductor wafer
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United States of America Patent
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Jun 16, 1998
Grant Date -
N/A
app pub date -
Dec 23, 1996
filing date -
Dec 23, 1995
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
An arm structure of a wafer transfer robot for transporting a semiconductor wafer by vacuum absorption, comprising a body, a plurality of fingers extending in parallel from respective ends of a main vacuum line formed in the body, a plurality of branch vacuum lines extending from the main vacuum line through the fingers, respectively, and being in communication with the main vacuum line, a plurality of vacuum-absorbing projections provided with openings in communication with the respective branch vacuum lines, and projected upwardly on each upper surface of the fingers, for holding the wafer by vacuum-absorption, and structures for horizontally supporting the wafer on the arm. With this wafer transfer robot arm, the wafer can be stably transported because vacuum leakage does not occur between the arm and the wafer held by a vacuum absorption.
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