Microelectronic encapsulation methods and equipment

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United States of America Patent

PATENT NO 5766987
SERIAL NO

08532235

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Abstract

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Microelectronic assemblies such as semiconductor chip assemblies are encapsulated. During encapsulation, the terminals carried by a dielectric layer in each assembly, and the bottom surface of the semiconductor chip in each assembly are protected by covering layers. The covering layers confine the liquid encapsulant and prevent contamination of the terminals and chip bottom surfaces. The encapsulation process may be conducted by using a tilting fixture. The liquid encapsulant and the assemblies are placed into the fixture, the fixture is closed and evacuated, and the encapsulant is then poured onto the assemblies while maintaining the fixture under vacuum. The fixture is then pressurized and maintained under pressure during cure of the encapsulant.

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Patent Owner(s)

Patent OwnerAddress
TESSERA INC3025 ORCHARD PARKWAY SAN JOSE CA 95134

International Classification(s)

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Distefano, Thomas H Monte Sereno, CA 191 14662
Mitchell, Craig Coral Springs, FL 116 3503

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