Method and apparatus for measurement of mobile charges with a corona screen gun
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United States of America Patent
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Jun 16, 1998
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N/A
app pub date -
Sep 4, 1996
filing date -
Sep 4, 1996
priority date (Note) -
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Abstract
The surface of a wafer is charged with corona passing through a screen. The screen is part of a feedback loop that forces a constant corona current. This results in the potential of the wafer surface following the potential of the screen. This allows contemporaneous measurement of the surface charge and potential that are used to measure mobile charge in an oxide layer on the wafer.
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