Optical analyzer for measuring reflectivity of moving substrate
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United States of America Patent
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Jun 16, 1998
Grant Date -
N/A
app pub date -
Dec 6, 1995
filing date -
Dec 6, 1995
priority date (Note) -
Expired
status (Latency Note)
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Abstract
An optical analyzer measuring the reflectivity of a moving article in an in-line sputtering deposition system. The optical analyzer includes a light source which provides a light beam. Light is reflected from an optical coating of a moving article into a concentrator, which captures and directs the reflected light to a detector. The analyzer may be mounted in an evacuable chamber in which the end walls have openings to allow passage of the article.
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