Location monitoring of wafer batches
Number of patents in Portfolio can not be more than 2000
United States of America Patent
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-
Jun 23, 1998
Grant Date -
N/A
app pub date -
Jun 8, 1995
filing date -
Jun 8, 1995
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A wafer cassette for storing, transporting and processing a plurality of wafers has a versatile adapter for removably receiving and attaching a transponder device to any convenient, predetermined surface location on the wafer cassette. The apparatus including the versatile adapter allows the wafer cassette to be used with a wide variety of processing equipment and fixtures without modification or customization, in contrast to similar apparatus known in the art.
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