Coating apparatus
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United States of America Patent
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-
Jun 30, 1998
Grant Date -
N/A
app pub date -
Oct 9, 1996
filing date -
Oct 13, 1995
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
A coating apparatus comprises a spin chuck for holding and rotating a substrate, a header unit movable along a linear line connecting a position just above a center-of-rotation of the substrate, to a home position of the unit, a plurality of nozzles included in the header unit for discharging coating liquids to the substrate held on the spin chuck, the first nozzles having their respective nozzle ports arranged in line along the linear line, and a plurality of coating liquid supply means for supplying the coating liquids to the first nozzles, respectively.
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Cited Art Landscape
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