System for evaluating thin film coatings
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United States of America Patent
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Jun 30, 1998
Grant Date -
N/A
app pub date -
Oct 16, 1995
filing date -
Oct 16, 1995
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A system for evaluating the reflectance of an object (e.g., a CRT) that is coated with an anti-reflective coating material is disclosed. The quality and/or uniformity of the coating is evaluated by a reflectometer. The reflectometer is positioned relative to the object by non-contact sensors. Reflectance data gathered by the reflectometer is analyzed to determine to what extent the actual coating differs from the optimal (i.e., ideal) coating. A feedback system modifies the coating process for subsequent objects in an attempt to fine-tune the coating process and achieve optimal anti-reflective coatings for later objects passing through the system.
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