Importance

Loading Importance Indicators...

Abstract

A method of fabricating a multilayer capacitor includes depositing a plurality of electrode layers on a substrate alternately with a plurality of amorphous hydrogenated carbon dielectric layers, forming at least two holes in the electrode and dielectric layers with each hole intersecting alternating ones of the electrode layers, and providing an electrically conductive material in each hole for coupling the alternating ones of the electrode layers. Forming the holes can include forming initial holes and then further exposing selected edge portions of the electrode layers by widening dielectric layer portions of the initial holes. Providing the electrically conductive material can include coating surfaces of the holes with an electrically conductive layer and pouring an electrically conductive filler material into the holes. If filler material is poured into the holes, a capacitor lead can be positioned adjacent the filler material and attached by hardening the filler material.

Loading the Abstract Image...

First Claim