Method and apparatus using an anode basket for electroplating a workpiece
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United States of America Patent
Stats
-
Jul 7, 1998
Grant Date -
N/A
app pub date -
Oct 16, 1996
filing date -
Oct 16, 1996
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A method and apparatus are provided for electroplating a workpiece. The apparatus includes an anode basket containing particles of an electroplating material. A mask is positioned around the anode basket to selectively block current flow from the basket to the workpiece which is mounted to a cathode. The mask includes a frame supporting a number of non-conductive plates adjusted in position to provide a desired electrical field distribution. The resulting electrical field between the anode and the cathode produces uniform plating thickness over the entire surface of the workpiece.
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