Semiconductor device having improved alignment marks
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United States of America Patent
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Jul 7, 1998
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N/A
app pub date -
Mar 28, 1996
filing date -
Mar 28, 1995
priority date (Note) -
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Abstract
In a semiconductor device including a plurality of chip areas arranged in a matrix and a grid-like scribe areas a plurality of L-shaped alignment segments and a plurality of pairs of I-shaped alignment segments are provided within the scribe area. Each of the L-shaped alignment segments is located within a first quadrant defined by an X direction center line and a Y direction center line of the scirbe area, and each pair of the I-shaped alignment segments is located within a second quadrant defined by the X direction center line and the Y direction center line adjacent to the first quadrant.
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