High breakdown field emission device with tapered cylindrical spacers
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United States of America Patent
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Jul 7, 1998
Grant Date -
N/A
app pub date -
Apr 7, 1997
filing date -
Apr 7, 1997
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A field emission device (100) includes a supporting substrate (110) having a major surface; a cathode (111) disposed on the major surface of the supporting substrate (110); a dielectric layer (112) disposed on the cathode (111); a gate extraction electrode (114) disposed on the dielectric layer (112); the cathode (111), the dielectric layer (112), and the gate extraction electrode (114) defining a spacer well (132); an anode plate (104) opposing the gate extraction electrode (114); a spacer (106) extending between the cathode (111) at the spacer well (132) and the anode plate (104); a first spacer shield (108) disposed within the spacer well (132) and surrounding the spacer (106); and a second spacer shield (108) affixed to the anode plate (104) and surrounding the spacer (106).
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