Importance

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Abstract

A power supply for driving two magnetron sputtering devices in a bipolar mode includes current pulse circuits one for driving each of the two magnetrons. Each of the current pulse circuits converts positive and negative voltage outputs of a DC electrical power source to a train of regulated current pulses of independently adjustable duration. Each of the current pulse circuits includes a circuit block for converting the DC output voltage to a source of regulated current and delivering that regulated current to an input end of an inductor. Each of the current pulse circuits also includes an output switching circuit block which periodically and alternatively switches an output terminal between an output end of the inductor and the positive voltage output of the DC power source. The power supply may be configured to drive one magnetron in a unipolar mode alone or as an alternative to driving two magnetrons in a bipolar mode. A current pulse circuit may be used independently to provide a current pulse train from a DC voltage source for driving a device other than a magnetron. The current converting and regulating circuit block may be used independently for providing a regulated current source from a DC voltage source.

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First Claim