Vibratory structure, method for controlling natural frequency thereof, and actuator, sensor, accelerator, gyroscope and gyroscope natural frequency controlling method using vibratory structure
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United States of America Patent
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Jul 14, 1998
Issued Date -
N/A
app pub date -
Oct 23, 1996
filing date -
Oct 27, 1995
priority date (Note) -
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status (Latency Note)
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Abstract
A vibratory structure and a method for controlling the natural frequency thereof are provided. The device has at least one elastic member supported by a first support end, an inertial object which vibrates by the elastic force of the elastic member, a moving electrode coupled to the inertial object, at least one effective stiffness controlling electrode supported by a second support end, and a power supplier for applying a voltage to generate an electric force between the moving electrode and the effective stiffness controlling electrode. This vibratory structure can contribute to controlling and improving the performance of a sensor, an actuator or a gyroscope, which employs the vibratory structure.
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