Fluidized bed deposition of diamond
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United States of America Patent
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Jul 21, 1998
Grant Date -
N/A
app pub date -
Apr 7, 1992
filing date -
Apr 7, 1992
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A process for coating a substrate with diamond or diamond-like material including maintaining a substrate within a bed of particles capable of being fluidized, the particles having substantially uniform dimensions and the substrate characterized as having different dimensions than the bed particles, fluidizing the bed of particles, and depositing a coating of diamond or diamond-like material upon the substrate by chemical vapor deposition of a carbon-containing precursor gas mixture, the precursor gas mixture introduced into the fluidized bed under conditions resulting in excitation mechanisms sufficient to form the diamond coating.
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